4/19/2012	7:40:43 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/19/2012	7:40:44 AM	Recipe started at 7:40 AM
4/19/2012	7:40:44 AM	Helium valve closed
4/19/2012	7:40:44 AM	H2 valve closed
4/19/2012	7:40:44 AM	BCl3 valve closed
4/19/2012	7:40:44 AM	PH3 valve closed
4/19/2012	7:40:44 AM	SiCl4 pre valve closed
4/19/2012	7:40:44 AM	SiCl4 post valve closed
4/19/2012	7:40:44 AM	Main Vac valve closed
4/19/2012	7:40:44 AM	Bypass valve closed
4/19/2012	7:40:44 AM	Bubbler valve closed
4/19/2012	7:40:44 AM	Helium MFC set to  0.000000
4/19/2012	7:40:44 AM	H2 MFC set to  0.000000
4/19/2012	7:40:44 AM	BCl3 MFC set to  0.000000
4/19/2012	7:40:44 AM	PH3 MFC set to  0.000000
4/19/2012	7:40:44 AM	SiCl4 MFC set to  0.000000
4/19/2012	7:40:44 AM	Bypass solenoid MFC set to  0.000000
4/19/2012	7:40:44 AM	Tube furnace set to 0
4/19/2012	7:40:47 AM	H2 valve closed
4/19/2012	7:40:47 AM	BCl3 valve closed
4/19/2012	7:40:47 AM	PH3 valve closed
4/19/2012	7:40:47 AM	SiCl4 pre valve closed
4/19/2012	7:40:47 AM	SiCl4 post valve closed
4/19/2012	7:40:47 AM	Main Vac valve closed
4/19/2012	7:40:47 AM	Bypass valve closed
4/19/2012	7:40:47 AM	Bubbler valve closed
4/19/2012	7:40:47 AM	Helium valve opened
4/19/2012	7:40:47 AM	Helium MFC set to  500.000000
4/19/2012	7:40:47 AM	H2 MFC set to  0.000000
4/19/2012	7:40:47 AM	BCl3 MFC set to  0.000000
4/19/2012	7:40:47 AM	PH3 MFC set to  0.000000
4/19/2012	7:40:47 AM	SiCl4 MFC set to  0.000000
4/19/2012	7:40:47 AM	Bypass solenoid MFC set to  0.000000
4/19/2012	7:40:47 AM	Tube furnace set to 0
4/19/2012	7:41:52 AM	Helium valve closed
4/19/2012	7:41:52 AM	H2 valve closed
4/19/2012	7:41:52 AM	BCl3 valve closed
4/19/2012	7:41:52 AM	PH3 valve closed
4/19/2012	7:41:52 AM	SiCl4 pre valve closed
4/19/2012	7:41:52 AM	SiCl4 post valve closed
4/19/2012	7:41:52 AM	Main Vac valve closed
4/19/2012	7:41:52 AM	Bypass valve closed
4/19/2012	7:41:52 AM	Bubbler valve closed
4/19/2012	7:41:52 AM	Helium MFC set to  0.000000
4/19/2012	7:41:52 AM	H2 MFC set to  0.000000
4/19/2012	7:41:52 AM	BCl3 MFC set to  0.000000
4/19/2012	7:41:52 AM	PH3 MFC set to  0.000000
4/19/2012	7:41:52 AM	SiCl4 MFC set to  0.000000
4/19/2012	7:41:52 AM	Bypass solenoid MFC set to  0.000000
4/19/2012	7:41:52 AM	Tube furnace set to 0
4/19/2012	7:41:53 AM	Run finished at 7:41 AM
4/19/2012	7:41:53 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/19/2012	7:55:22 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/19/2012	7:55:23 AM	Recipe started at 7:55 AM
4/19/2012	7:55:23 AM	Helium valve closed
4/19/2012	7:55:23 AM	H2 valve closed
4/19/2012	7:55:23 AM	BCl3 valve closed
4/19/2012	7:55:23 AM	PH3 valve closed
4/19/2012	7:55:23 AM	SiCl4 pre valve closed
4/19/2012	7:55:23 AM	SiCl4 post valve closed
4/19/2012	7:55:23 AM	Main Vac valve closed
4/19/2012	7:55:23 AM	Bubbler valve closed
4/19/2012	7:55:23 AM	Bypass valve opened
4/19/2012	7:55:23 AM	Helium MFC set to  0.000000
4/19/2012	7:55:23 AM	H2 MFC set to  0.000000
4/19/2012	7:55:23 AM	BCl3 MFC set to  0.000000
4/19/2012	7:55:23 AM	PH3 MFC set to  0.000000
4/19/2012	7:55:23 AM	SiCl4 MFC set to  0.000000
4/19/2012	7:55:23 AM	Bypass solenoid MFC set to  0.000000
4/19/2012	7:55:24 AM	Tube furnace set to 0
4/19/2012	7:56:24 AM	Helium valve closed
4/19/2012	7:56:24 AM	H2 valve closed
4/19/2012	7:56:24 AM	BCl3 valve closed
4/19/2012	7:56:24 AM	PH3 valve closed
4/19/2012	7:56:24 AM	SiCl4 pre valve closed
4/19/2012	7:56:24 AM	SiCl4 post valve closed
4/19/2012	7:56:24 AM	Main Vac valve closed
4/19/2012	7:56:24 AM	Bubbler valve closed
4/19/2012	7:56:24 AM	Bypass valve opened
4/19/2012	7:56:24 AM	Helium MFC set to  0.000000
4/19/2012	7:56:24 AM	H2 MFC set to  0.000000
4/19/2012	7:56:24 AM	BCl3 MFC set to  0.000000
4/19/2012	7:56:24 AM	PH3 MFC set to  0.000000
4/19/2012	7:56:24 AM	SiCl4 MFC set to  0.000000
4/19/2012	7:56:24 AM	Bypass solenoid MFC set to  0.000000
4/19/2012	7:56:24 AM	Tube furnace set to 0
4/19/2012	7:57:24 AM	Helium valve closed
4/19/2012	7:57:24 AM	H2 valve closed
4/19/2012	7:57:24 AM	BCl3 valve closed
4/19/2012	7:57:24 AM	PH3 valve closed
4/19/2012	7:57:24 AM	SiCl4 pre valve closed
4/19/2012	7:57:24 AM	SiCl4 post valve closed
4/19/2012	7:57:24 AM	Bypass valve closed
4/19/2012	7:57:24 AM	Bubbler valve closed
4/19/2012	7:57:24 AM	Main Vac valve opened
4/19/2012	7:57:24 AM	Helium MFC set to  0.000000
4/19/2012	7:57:24 AM	H2 MFC set to  0.000000
4/19/2012	7:57:24 AM	BCl3 MFC set to  0.000000
4/19/2012	7:57:24 AM	PH3 MFC set to  0.000000
4/19/2012	7:57:24 AM	SiCl4 MFC set to  0.000000
4/19/2012	7:57:24 AM	Bypass solenoid MFC set to  0.000000
4/19/2012	7:57:25 AM	Tube furnace set to 0
4/19/2012	7:57:26 AM	Run finished at 7:57 AM
4/19/2012	7:57:26 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/19/2012	9:49:11 AM	Main Vac valve closed
4/19/2012	9:49:28 AM	Main Vac valve opened
4/19/2012	9:50:42 AM	Recipe started at 9:50 AM
4/19/2012	9:50:42 AM	Helium valve closed
4/19/2012	9:50:42 AM	H2 valve closed
4/19/2012	9:50:42 AM	BCl3 valve closed
4/19/2012	9:50:42 AM	PH3 valve closed
4/19/2012	9:50:42 AM	SiCl4 pre valve closed
4/19/2012	9:50:42 AM	SiCl4 post valve closed
4/19/2012	9:50:42 AM	Bypass valve closed
4/19/2012	9:50:42 AM	Bubbler valve closed
4/19/2012	9:50:42 AM	Main Vac valve opened
4/19/2012	9:50:42 AM	Helium MFC set to  0.000000
4/19/2012	9:50:42 AM	H2 MFC set to  0.000000
4/19/2012	9:50:42 AM	BCl3 MFC set to  0.000000
4/19/2012	9:50:42 AM	PH3 MFC set to  0.000000
4/19/2012	9:50:42 AM	SiCl4 MFC set to  0.000000
4/19/2012	9:50:42 AM	Bypass solenoid MFC set to  0.000000
4/19/2012	9:50:42 AM	Tube furnace set to 0
4/19/2012	9:50:45 AM	Helium valve closed
4/19/2012	9:50:45 AM	H2 valve closed
4/19/2012	9:50:45 AM	BCl3 valve closed
4/19/2012	9:50:45 AM	PH3 valve closed
4/19/2012	9:50:45 AM	SiCl4 pre valve closed
4/19/2012	9:50:45 AM	SiCl4 post valve closed
4/19/2012	9:50:45 AM	Main Vac valve closed
4/19/2012	9:50:45 AM	Bypass valve closed
4/19/2012	9:50:45 AM	Bubbler valve closed
4/19/2012	9:50:45 AM	Helium MFC set to  0.000000
4/19/2012	9:50:45 AM	H2 MFC set to  0.000000
4/19/2012	9:50:45 AM	BCl3 MFC set to  0.000000
4/19/2012	9:50:45 AM	PH3 MFC set to  0.000000
4/19/2012	9:50:45 AM	SiCl4 MFC set to  0.000000
4/19/2012	9:50:45 AM	Bypass solenoid MFC set to  0.000000
4/19/2012	9:50:45 AM	Tube furnace set to 0
4/19/2012	9:50:48 AM	Helium valve closed
4/19/2012	9:50:48 AM	BCl3 valve closed
4/19/2012	9:50:48 AM	PH3 valve closed
4/19/2012	9:50:48 AM	SiCl4 pre valve closed
4/19/2012	9:50:48 AM	SiCl4 post valve closed
4/19/2012	9:50:48 AM	Main Vac valve closed
4/19/2012	9:50:48 AM	Bypass valve closed
4/19/2012	9:50:48 AM	Bubbler valve closed
4/19/2012	9:50:48 AM	H2 valve opened
4/19/2012	9:50:48 AM	Helium MFC set to  0.000000
4/19/2012	9:50:48 AM	H2 MFC set to  500.000000
4/19/2012	9:50:48 AM	BCl3 MFC set to  0.000000
4/19/2012	9:50:48 AM	PH3 MFC set to  0.000000
4/19/2012	9:50:48 AM	SiCl4 MFC set to  0.000000
4/19/2012	9:50:48 AM	Bypass solenoid MFC set to  0.000000
4/19/2012	9:50:48 AM	Tube furnace set to 0
4/19/2012	9:51:56 AM	Helium valve closed
4/19/2012	9:51:56 AM	BCl3 valve closed
4/19/2012	9:51:56 AM	PH3 valve closed
4/19/2012	9:51:56 AM	SiCl4 pre valve closed
4/19/2012	9:51:56 AM	SiCl4 post valve closed
4/19/2012	9:51:56 AM	Main Vac valve closed
4/19/2012	9:51:56 AM	Bypass valve closed
4/19/2012	9:51:56 AM	H2 valve opened
4/19/2012	9:51:56 AM	Bubbler valve opened
4/19/2012	9:51:56 AM	Helium MFC set to  0.000000
4/19/2012	9:51:56 AM	H2 MFC set to  500.000000
4/19/2012	9:51:56 AM	BCl3 MFC set to  0.000000
4/19/2012	9:51:56 AM	PH3 MFC set to  0.000000
4/19/2012	9:51:56 AM	SiCl4 MFC set to  0.000000
4/19/2012	9:51:56 AM	Bypass solenoid MFC set to  0.000000
4/19/2012	9:51:56 AM	Tube furnace set to 0
4/19/2012	9:51:57 AM	Helium valve closed
4/19/2012	9:51:57 AM	BCl3 valve closed
4/19/2012	9:51:58 AM	PH3 valve closed
4/19/2012	9:51:58 AM	SiCl4 pre valve closed
4/19/2012	9:51:58 AM	SiCl4 post valve closed
4/19/2012	9:51:58 AM	Main Vac valve closed
4/19/2012	9:51:58 AM	Bypass valve closed
4/19/2012	9:51:58 AM	H2 valve opened
4/19/2012	9:51:58 AM	Bubbler valve opened
4/19/2012	9:51:58 AM	Helium MFC set to  0.000000
4/19/2012	9:51:58 AM	H2 MFC set to  500.000000
4/19/2012	9:51:58 AM	BCl3 MFC set to  0.000000
4/19/2012	9:51:58 AM	PH3 MFC set to  0.000000
4/19/2012	9:51:58 AM	SiCl4 MFC set to  0.000000
4/19/2012	9:51:58 AM	Bypass solenoid MFC set to  0.000000
4/19/2012	9:51:58 AM	Tube furnace set to 1000
4/19/2012	10:16:58 AM	Helium valve closed
4/19/2012	10:16:58 AM	BCl3 valve closed
4/19/2012	10:16:58 AM	Main Vac valve closed
4/19/2012	10:16:58 AM	Bypass valve closed
4/19/2012	10:16:58 AM	H2 valve opened
4/19/2012	10:16:58 AM	PH3 valve opened
4/19/2012	10:16:58 AM	SiCl4 pre valve opened
4/19/2012	10:16:58 AM	SiCl4 post valve opened
4/19/2012	10:16:58 AM	Bubbler valve opened
4/19/2012	10:16:58 AM	Helium MFC set to  0.000000
4/19/2012	10:16:58 AM	H2 MFC set to  430.000000
4/19/2012	10:16:58 AM	BCl3 MFC set to  0.000000
4/19/2012	10:16:58 AM	PH3 MFC set to  20.000000
4/19/2012	10:16:58 AM	SiCl4 MFC set to  50.000000
4/19/2012	10:16:58 AM	Bypass solenoid MFC set to  0.000000
4/19/2012	10:16:58 AM	Tube furnace set to 1000
4/19/2012	10:37:58 AM	Helium valve closed
4/19/2012	10:37:58 AM	BCl3 valve closed
4/19/2012	10:37:58 AM	PH3 valve closed
4/19/2012	10:37:58 AM	SiCl4 pre valve closed
4/19/2012	10:37:58 AM	SiCl4 post valve closed
4/19/2012	10:37:58 AM	Main Vac valve closed
4/19/2012	10:37:58 AM	Bypass valve closed
4/19/2012	10:37:58 AM	H2 valve opened
4/19/2012	10:37:58 AM	Bubbler valve opened
4/19/2012	10:37:58 AM	Helium MFC set to  0.000000
4/19/2012	10:37:58 AM	H2 MFC set to  500.000000
4/19/2012	10:37:58 AM	BCl3 MFC set to  0.000000
4/19/2012	10:37:58 AM	PH3 MFC set to  0.000000
4/19/2012	10:37:58 AM	SiCl4 MFC set to  0.000000
4/19/2012	10:37:58 AM	Bypass solenoid MFC set to  0.000000
4/19/2012	10:37:58 AM	Tube furnace set to 750
4/19/2012	10:52:58 AM	H2 valve closed
4/19/2012	10:52:58 AM	BCl3 valve closed
4/19/2012	10:52:58 AM	PH3 valve closed
4/19/2012	10:52:58 AM	SiCl4 pre valve closed
4/19/2012	10:52:58 AM	SiCl4 post valve closed
4/19/2012	10:52:58 AM	Main Vac valve closed
4/19/2012	10:52:58 AM	Bypass valve closed
4/19/2012	10:52:58 AM	Helium valve opened
4/19/2012	10:52:58 AM	Bubbler valve opened
4/19/2012	10:52:58 AM	Helium MFC set to  500.000000
4/19/2012	10:52:58 AM	H2 MFC set to  0.000000
4/19/2012	10:52:58 AM	BCl3 MFC set to  0.000000
4/19/2012	10:52:58 AM	PH3 MFC set to  0.000000
4/19/2012	10:52:58 AM	SiCl4 MFC set to  0.000000
4/19/2012	10:52:58 AM	Bypass solenoid MFC set to  0.000000
4/19/2012	10:52:58 AM	Tube furnace set to 0
4/19/2012	11:12:58 AM	Helium valve closed
4/19/2012	11:12:58 AM	H2 valve closed
4/19/2012	11:12:58 AM	BCl3 valve closed
4/19/2012	11:12:58 AM	PH3 valve closed
4/19/2012	11:12:58 AM	SiCl4 pre valve closed
4/19/2012	11:12:59 AM	SiCl4 post valve closed
4/19/2012	11:12:59 AM	Main Vac valve closed
4/19/2012	11:12:59 AM	Bypass valve closed
4/19/2012	11:12:59 AM	Bubbler valve closed
4/19/2012	11:12:59 AM	Helium MFC set to  0.000000
4/19/2012	11:12:59 AM	H2 MFC set to  0.000000
4/19/2012	11:12:59 AM	BCl3 MFC set to  0.000000
4/19/2012	11:12:59 AM	PH3 MFC set to  0.000000
4/19/2012	11:12:59 AM	SiCl4 MFC set to  0.000000
4/19/2012	11:12:59 AM	Bypass solenoid MFC set to  0.000000
4/19/2012	11:12:59 AM	Tube furnace set to 0
4/19/2012	11:32:59 AM	Helium valve closed
4/19/2012	11:32:59 AM	H2 valve closed
4/19/2012	11:32:59 AM	BCl3 valve closed
4/19/2012	11:32:59 AM	PH3 valve closed
4/19/2012	11:32:59 AM	SiCl4 pre valve closed
4/19/2012	11:32:59 AM	SiCl4 post valve closed
4/19/2012	11:32:59 AM	Main Vac valve closed
4/19/2012	11:32:59 AM	Bubbler valve closed
4/19/2012	11:32:59 AM	Bypass valve opened
4/19/2012	11:32:59 AM	Helium MFC set to  0.000000
4/19/2012	11:32:59 AM	H2 MFC set to  0.000000
4/19/2012	11:32:59 AM	BCl3 MFC set to  0.000000
4/19/2012	11:32:59 AM	PH3 MFC set to  0.000000
4/19/2012	11:32:59 AM	SiCl4 MFC set to  0.000000
4/19/2012	11:32:59 AM	Bypass solenoid MFC set to  0.000000
4/19/2012	11:32:59 AM	Tube furnace set to 0
4/19/2012	11:33:48 AM	Helium valve closed
4/19/2012	11:33:48 AM	H2 valve closed
4/19/2012	11:33:48 AM	BCl3 valve closed
4/19/2012	11:33:48 AM	PH3 valve closed
4/19/2012	11:33:48 AM	SiCl4 pre valve closed
4/19/2012	11:33:48 AM	SiCl4 post valve closed
4/19/2012	11:33:48 AM	Main Vac valve closed
4/19/2012	11:33:48 AM	Bubbler valve closed
4/19/2012	11:33:48 AM	Bypass valve opened
4/19/2012	11:33:48 AM	Helium MFC set to  0.000000
4/19/2012	11:33:48 AM	H2 MFC set to  0.000000
4/19/2012	11:33:48 AM	BCl3 MFC set to  0.000000
4/19/2012	11:33:48 AM	PH3 MFC set to  0.000000
4/19/2012	11:33:48 AM	SiCl4 MFC set to  0.000000
4/19/2012	11:33:48 AM	Bypass solenoid MFC set to  0.000000
4/19/2012	11:33:49 AM	Tube furnace set to 0
4/19/2012	11:34:49 AM	Helium valve closed
4/19/2012	11:34:49 AM	H2 valve closed
4/19/2012	11:34:49 AM	BCl3 valve closed
4/19/2012	11:34:49 AM	PH3 valve closed
4/19/2012	11:34:49 AM	SiCl4 pre valve closed
4/19/2012	11:34:49 AM	SiCl4 post valve closed
4/19/2012	11:34:49 AM	Bypass valve closed
4/19/2012	11:34:49 AM	Bubbler valve closed
4/19/2012	11:34:49 AM	Main Vac valve opened
4/19/2012	11:34:49 AM	Helium MFC set to  0.000000
4/19/2012	11:34:49 AM	H2 MFC set to  0.000000
4/19/2012	11:34:49 AM	BCl3 MFC set to  0.000000
4/19/2012	11:34:49 AM	PH3 MFC set to  0.000000
4/19/2012	11:34:49 AM	SiCl4 MFC set to  0.000000
4/19/2012	11:34:49 AM	Bypass solenoid MFC set to  0.000000
4/19/2012	11:34:49 AM	Tube furnace set to 0
4/19/2012	11:34:51 AM	Run aborted at 11:34 AM
4/19/2012	11:34:51 AM	Helium valve closed
4/19/2012	11:34:51 AM	H2 valve closed
4/19/2012	11:34:51 AM	BCl3 valve closed
4/19/2012	11:34:51 AM	PH3 valve closed
4/19/2012	11:34:51 AM	SiCl4 pre valve closed
4/19/2012	11:34:51 AM	SiCl4 post valve closed
4/19/2012	11:34:51 AM	Bypass valve closed
4/19/2012	11:34:51 AM	Main Vac valve closed
4/19/2012	11:34:51 AM	Bubbler valve closed
4/19/2012	11:34:51 AM	Helium MFC set to  0.000000
4/19/2012	11:34:51 AM	H2 MFC set to  0.000000
4/19/2012	11:34:51 AM	BCl3 MFC set to  0.000000
4/19/2012	11:34:51 AM	PH3 MFC set to  0.000000
4/19/2012	11:34:51 AM	SiCl4 MFC set to  0.000000
4/19/2012	11:34:52 AM	Tube furnace set to 0
4/19/2012	11:34:58 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/19/2012	11:34:59 AM	Recipe started at 11:34 AM
4/19/2012	11:34:59 AM	Helium valve closed
4/19/2012	11:34:59 AM	H2 valve closed
4/19/2012	11:34:59 AM	BCl3 valve closed
4/19/2012	11:34:59 AM	PH3 valve closed
4/19/2012	11:34:59 AM	SiCl4 pre valve closed
4/19/2012	11:34:59 AM	SiCl4 post valve closed
4/19/2012	11:34:59 AM	Main Vac valve closed
4/19/2012	11:34:59 AM	Bypass valve closed
4/19/2012	11:34:59 AM	Bubbler valve closed
4/19/2012	11:34:59 AM	Helium MFC set to  0.000000
4/19/2012	11:34:59 AM	H2 MFC set to  0.000000
4/19/2012	11:34:59 AM	BCl3 MFC set to  0.000000
4/19/2012	11:34:59 AM	PH3 MFC set to  0.000000
4/19/2012	11:34:59 AM	SiCl4 MFC set to  0.000000
4/19/2012	11:34:59 AM	Bypass solenoid MFC set to  0.000000
4/19/2012	11:35:00 AM	Tube furnace set to 0
4/19/2012	11:35:03 AM	H2 valve closed
4/19/2012	11:35:03 AM	BCl3 valve closed
4/19/2012	11:35:03 AM	PH3 valve closed
4/19/2012	11:35:03 AM	SiCl4 pre valve closed
4/19/2012	11:35:03 AM	SiCl4 post valve closed
4/19/2012	11:35:03 AM	Main Vac valve closed
4/19/2012	11:35:03 AM	Bypass valve closed
4/19/2012	11:35:03 AM	Bubbler valve closed
4/19/2012	11:35:03 AM	Helium valve opened
4/19/2012	11:35:03 AM	Helium MFC set to  500.000000
4/19/2012	11:35:03 AM	H2 MFC set to  0.000000
4/19/2012	11:35:03 AM	BCl3 MFC set to  0.000000
4/19/2012	11:35:03 AM	PH3 MFC set to  0.000000
4/19/2012	11:35:03 AM	SiCl4 MFC set to  0.000000
4/19/2012	11:35:03 AM	Bypass solenoid MFC set to  0.000000
4/19/2012	11:35:03 AM	Tube furnace set to 0
4/19/2012	11:36:04 AM	Helium valve closed
4/19/2012	11:36:04 AM	H2 valve closed
4/19/2012	11:36:04 AM	BCl3 valve closed
4/19/2012	11:36:04 AM	PH3 valve closed
4/19/2012	11:36:04 AM	SiCl4 pre valve closed
4/19/2012	11:36:04 AM	SiCl4 post valve closed
4/19/2012	11:36:04 AM	Main Vac valve closed
4/19/2012	11:36:04 AM	Bypass valve closed
4/19/2012	11:36:04 AM	Bubbler valve closed
4/19/2012	11:36:04 AM	Helium MFC set to  0.000000
4/19/2012	11:36:04 AM	H2 MFC set to  0.000000
4/19/2012	11:36:04 AM	BCl3 MFC set to  0.000000
4/19/2012	11:36:04 AM	PH3 MFC set to  0.000000
4/19/2012	11:36:04 AM	SiCl4 MFC set to  0.000000
4/19/2012	11:36:04 AM	Bypass solenoid MFC set to  0.000000
4/19/2012	11:36:04 AM	Tube furnace set to 0
4/19/2012	11:36:05 AM	Run finished at 11:36 AM
4/19/2012	11:36:05 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/19/2012	11:41:20 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/19/2012	11:41:21 AM	Recipe started at 11:41 AM
4/19/2012	11:41:21 AM	Helium valve closed
4/19/2012	11:41:21 AM	H2 valve closed
4/19/2012	11:41:21 AM	BCl3 valve closed
4/19/2012	11:41:21 AM	PH3 valve closed
4/19/2012	11:41:21 AM	SiCl4 pre valve closed
4/19/2012	11:41:21 AM	SiCl4 post valve closed
4/19/2012	11:41:21 AM	Main Vac valve closed
4/19/2012	11:41:21 AM	Bubbler valve closed
4/19/2012	11:41:21 AM	Bypass valve opened
4/19/2012	11:41:21 AM	Helium MFC set to  0.000000
4/19/2012	11:41:21 AM	H2 MFC set to  0.000000
4/19/2012	11:41:21 AM	BCl3 MFC set to  0.000000
4/19/2012	11:41:21 AM	PH3 MFC set to  0.000000
4/19/2012	11:41:21 AM	SiCl4 MFC set to  0.000000
4/19/2012	11:41:21 AM	Bypass solenoid MFC set to  0.000000
4/19/2012	11:41:21 AM	Tube furnace set to 0
4/19/2012	11:42:22 AM	Helium valve closed
4/19/2012	11:42:22 AM	H2 valve closed
4/19/2012	11:42:22 AM	BCl3 valve closed
4/19/2012	11:42:22 AM	PH3 valve closed
4/19/2012	11:42:22 AM	SiCl4 pre valve closed
4/19/2012	11:42:22 AM	SiCl4 post valve closed
4/19/2012	11:42:22 AM	Main Vac valve closed
4/19/2012	11:42:22 AM	Bubbler valve closed
4/19/2012	11:42:22 AM	Bypass valve opened
4/19/2012	11:42:22 AM	Helium MFC set to  0.000000
4/19/2012	11:42:22 AM	H2 MFC set to  0.000000
4/19/2012	11:42:22 AM	BCl3 MFC set to  0.000000
4/19/2012	11:42:22 AM	PH3 MFC set to  0.000000
4/19/2012	11:42:22 AM	SiCl4 MFC set to  0.000000
4/19/2012	11:42:22 AM	Bypass solenoid MFC set to  0.000000
4/19/2012	11:42:23 AM	Tube furnace set to 0
4/19/2012	11:43:23 AM	Helium valve closed
4/19/2012	11:43:23 AM	H2 valve closed
4/19/2012	11:43:23 AM	BCl3 valve closed
4/19/2012	11:43:23 AM	PH3 valve closed
4/19/2012	11:43:23 AM	SiCl4 pre valve closed
4/19/2012	11:43:23 AM	SiCl4 post valve closed
4/19/2012	11:43:23 AM	Bypass valve closed
4/19/2012	11:43:23 AM	Bubbler valve closed
4/19/2012	11:43:23 AM	Main Vac valve opened
4/19/2012	11:43:23 AM	Helium MFC set to  0.000000
4/19/2012	11:43:23 AM	H2 MFC set to  0.000000
4/19/2012	11:43:23 AM	BCl3 MFC set to  0.000000
4/19/2012	11:43:23 AM	PH3 MFC set to  0.000000
4/19/2012	11:43:23 AM	SiCl4 MFC set to  0.000000
4/19/2012	11:43:23 AM	Bypass solenoid MFC set to  0.000000
4/19/2012	11:43:23 AM	Tube furnace set to 0
4/19/2012	11:43:24 AM	Run finished at 11:43 AM
4/19/2012	11:43:24 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/19/2012	11:44:12 AM	Recipe started at 11:44 AM
4/19/2012	11:44:12 AM	Helium valve closed
4/19/2012	11:44:12 AM	H2 valve closed
4/19/2012	11:44:12 AM	BCl3 valve closed
4/19/2012	11:44:12 AM	PH3 valve closed
4/19/2012	11:44:12 AM	SiCl4 pre valve closed
4/19/2012	11:44:12 AM	SiCl4 post valve closed
4/19/2012	11:44:12 AM	Bypass valve closed
4/19/2012	11:44:12 AM	Bubbler valve closed
4/19/2012	11:44:12 AM	Main Vac valve opened
4/19/2012	11:44:12 AM	Helium MFC set to  0.000000
4/19/2012	11:44:12 AM	H2 MFC set to  0.000000
4/19/2012	11:44:12 AM	BCl3 MFC set to  0.000000
4/19/2012	11:44:12 AM	PH3 MFC set to  0.000000
4/19/2012	11:44:12 AM	SiCl4 MFC set to  0.000000
4/19/2012	11:44:12 AM	Bypass solenoid MFC set to  0.000000
4/19/2012	11:44:12 AM	Tube furnace set to 0
4/19/2012	1:14:12 PM	Helium valve closed
4/19/2012	1:14:12 PM	H2 valve closed
4/19/2012	1:14:12 PM	BCl3 valve closed
4/19/2012	1:14:12 PM	PH3 valve closed
4/19/2012	1:14:12 PM	SiCl4 pre valve closed
4/19/2012	1:14:12 PM	SiCl4 post valve closed
4/19/2012	1:14:12 PM	Main Vac valve closed
4/19/2012	1:14:12 PM	Bypass valve closed
4/19/2012	1:14:12 PM	Bubbler valve closed
4/19/2012	1:14:12 PM	Helium MFC set to  0.000000
4/19/2012	1:14:12 PM	H2 MFC set to  0.000000
4/19/2012	1:14:12 PM	BCl3 MFC set to  0.000000
4/19/2012	1:14:12 PM	PH3 MFC set to  0.000000
4/19/2012	1:14:12 PM	SiCl4 MFC set to  0.000000
4/19/2012	1:14:12 PM	Bypass solenoid MFC set to  0.000000
4/19/2012	1:14:13 PM	Tube furnace set to 0
4/19/2012	1:14:16 PM	Helium valve closed
4/19/2012	1:14:16 PM	BCl3 valve closed
4/19/2012	1:14:16 PM	PH3 valve closed
4/19/2012	1:14:16 PM	SiCl4 pre valve closed
4/19/2012	1:14:16 PM	SiCl4 post valve closed
4/19/2012	1:14:16 PM	Main Vac valve closed
4/19/2012	1:14:16 PM	Bypass valve closed
4/19/2012	1:14:16 PM	Bubbler valve closed
4/19/2012	1:14:16 PM	H2 valve opened
4/19/2012	1:14:16 PM	Helium MFC set to  0.000000
4/19/2012	1:14:16 PM	H2 MFC set to  500.000000
4/19/2012	1:14:16 PM	BCl3 MFC set to  0.000000
4/19/2012	1:14:16 PM	PH3 MFC set to  0.000000
4/19/2012	1:14:16 PM	SiCl4 MFC set to  0.000000
4/19/2012	1:14:16 PM	Bypass solenoid MFC set to  0.000000
4/19/2012	1:14:16 PM	Tube furnace set to 0
4/19/2012	1:15:21 PM	Helium valve closed
4/19/2012	1:15:21 PM	BCl3 valve closed
4/19/2012	1:15:21 PM	PH3 valve closed
4/19/2012	1:15:21 PM	SiCl4 pre valve closed
4/19/2012	1:15:21 PM	SiCl4 post valve closed
4/19/2012	1:15:21 PM	Main Vac valve closed
4/19/2012	1:15:21 PM	Bypass valve closed
4/19/2012	1:15:21 PM	H2 valve opened
4/19/2012	1:15:21 PM	Bubbler valve opened
4/19/2012	1:15:21 PM	Helium MFC set to  0.000000
4/19/2012	1:15:21 PM	H2 MFC set to  500.000000
4/19/2012	1:15:21 PM	BCl3 MFC set to  0.000000
4/19/2012	1:15:21 PM	PH3 MFC set to  0.000000
4/19/2012	1:15:21 PM	SiCl4 MFC set to  0.000000
4/19/2012	1:15:21 PM	Bypass solenoid MFC set to  0.000000
4/19/2012	1:15:21 PM	Tube furnace set to 0
4/19/2012	1:15:22 PM	Helium valve closed
4/19/2012	1:15:22 PM	BCl3 valve closed
4/19/2012	1:15:22 PM	PH3 valve closed
4/19/2012	1:15:22 PM	SiCl4 pre valve closed
4/19/2012	1:15:22 PM	SiCl4 post valve closed
4/19/2012	1:15:22 PM	Main Vac valve closed
4/19/2012	1:15:22 PM	Bypass valve closed
4/19/2012	1:15:22 PM	H2 valve opened
4/19/2012	1:15:22 PM	Bubbler valve opened
4/19/2012	1:15:22 PM	Helium MFC set to  0.000000
4/19/2012	1:15:22 PM	H2 MFC set to  500.000000
4/19/2012	1:15:22 PM	BCl3 MFC set to  0.000000
4/19/2012	1:15:22 PM	PH3 MFC set to  0.000000
4/19/2012	1:15:22 PM	SiCl4 MFC set to  0.000000
4/19/2012	1:15:22 PM	Bypass solenoid MFC set to  0.000000
4/19/2012	1:15:23 PM	Tube furnace set to 1000
4/19/2012	1:40:22 PM	Helium valve closed
4/19/2012	1:40:22 PM	BCl3 valve closed
4/19/2012	1:40:22 PM	Main Vac valve closed
4/19/2012	1:40:22 PM	Bypass valve closed
4/19/2012	1:40:22 PM	H2 valve opened
4/19/2012	1:40:23 PM	PH3 valve opened
4/19/2012	1:40:23 PM	SiCl4 pre valve opened
4/19/2012	1:40:23 PM	SiCl4 post valve opened
4/19/2012	1:40:23 PM	Bubbler valve opened
4/19/2012	1:40:23 PM	Helium MFC set to  0.000000
4/19/2012	1:40:23 PM	H2 MFC set to  445.000000
4/19/2012	1:40:23 PM	BCl3 MFC set to  0.000000
4/19/2012	1:40:23 PM	PH3 MFC set to  5.000000
4/19/2012	1:40:23 PM	SiCl4 MFC set to  50.000000
4/19/2012	1:40:23 PM	Bypass solenoid MFC set to  0.000000
4/19/2012	1:40:23 PM	Tube furnace set to 1000
4/19/2012	2:01:23 PM	Helium valve closed
4/19/2012	2:01:23 PM	BCl3 valve closed
4/19/2012	2:01:23 PM	PH3 valve closed
4/19/2012	2:01:23 PM	SiCl4 pre valve closed
4/19/2012	2:01:23 PM	SiCl4 post valve closed
4/19/2012	2:01:23 PM	Main Vac valve closed
4/19/2012	2:01:23 PM	Bypass valve closed
4/19/2012	2:01:23 PM	H2 valve opened
4/19/2012	2:01:23 PM	Bubbler valve opened
4/19/2012	2:01:23 PM	Helium MFC set to  0.000000
4/19/2012	2:01:23 PM	H2 MFC set to  500.000000
4/19/2012	2:01:23 PM	BCl3 MFC set to  0.000000
4/19/2012	2:01:23 PM	PH3 MFC set to  0.000000
4/19/2012	2:01:23 PM	SiCl4 MFC set to  0.000000
4/19/2012	2:01:23 PM	Bypass solenoid MFC set to  0.000000
4/19/2012	2:01:23 PM	Tube furnace set to 750
4/19/2012	2:16:23 PM	H2 valve closed
4/19/2012	2:16:23 PM	BCl3 valve closed
4/19/2012	2:16:23 PM	PH3 valve closed
4/19/2012	2:16:23 PM	SiCl4 pre valve closed
4/19/2012	2:16:23 PM	SiCl4 post valve closed
4/19/2012	2:16:23 PM	Main Vac valve closed
4/19/2012	2:16:23 PM	Bypass valve closed
4/19/2012	2:16:23 PM	Helium valve opened
4/19/2012	2:16:23 PM	Bubbler valve opened
4/19/2012	2:16:23 PM	Helium MFC set to  500.000000
4/19/2012	2:16:23 PM	H2 MFC set to  0.000000
4/19/2012	2:16:23 PM	BCl3 MFC set to  0.000000
4/19/2012	2:16:23 PM	PH3 MFC set to  0.000000
4/19/2012	2:16:23 PM	SiCl4 MFC set to  0.000000
4/19/2012	2:16:23 PM	Bypass solenoid MFC set to  0.000000
4/19/2012	2:16:23 PM	Tube furnace set to 0
4/19/2012	2:36:23 PM	Helium valve closed
4/19/2012	2:36:23 PM	H2 valve closed
4/19/2012	2:36:23 PM	BCl3 valve closed
4/19/2012	2:36:23 PM	PH3 valve closed
4/19/2012	2:36:23 PM	SiCl4 pre valve closed
4/19/2012	2:36:23 PM	SiCl4 post valve closed
4/19/2012	2:36:23 PM	Main Vac valve closed
4/19/2012	2:36:23 PM	Bypass valve closed
4/19/2012	2:36:23 PM	Bubbler valve closed
4/19/2012	2:36:23 PM	Helium MFC set to  0.000000
4/19/2012	2:36:23 PM	H2 MFC set to  0.000000
4/19/2012	2:36:23 PM	BCl3 MFC set to  0.000000
4/19/2012	2:36:23 PM	PH3 MFC set to  0.000000
4/19/2012	2:36:23 PM	SiCl4 MFC set to  0.000000
4/19/2012	2:36:23 PM	Bypass solenoid MFC set to  0.000000
4/19/2012	2:36:23 PM	Tube furnace set to 0
4/19/2012	2:56:23 PM	Helium valve closed
4/19/2012	2:56:23 PM	H2 valve closed
4/19/2012	2:56:23 PM	BCl3 valve closed
4/19/2012	2:56:23 PM	PH3 valve closed
4/19/2012	2:56:23 PM	SiCl4 pre valve closed
4/19/2012	2:56:23 PM	SiCl4 post valve closed
4/19/2012	2:56:23 PM	Main Vac valve closed
4/19/2012	2:56:23 PM	Bubbler valve closed
4/19/2012	2:56:23 PM	Bypass valve opened
4/19/2012	2:56:23 PM	Helium MFC set to  0.000000
4/19/2012	2:56:23 PM	H2 MFC set to  0.000000
4/19/2012	2:56:23 PM	BCl3 MFC set to  0.000000
4/19/2012	2:56:23 PM	PH3 MFC set to  0.000000
4/19/2012	2:56:23 PM	SiCl4 MFC set to  0.000000
4/19/2012	2:56:23 PM	Bypass solenoid MFC set to  0.000000
4/19/2012	2:56:24 PM	Tube furnace set to 0
4/19/2012	2:57:10 PM	Helium valve closed
4/19/2012	2:57:10 PM	H2 valve closed
4/19/2012	2:57:10 PM	BCl3 valve closed
4/19/2012	2:57:10 PM	PH3 valve closed
4/19/2012	2:57:10 PM	SiCl4 pre valve closed
4/19/2012	2:57:10 PM	SiCl4 post valve closed
4/19/2012	2:57:10 PM	Main Vac valve closed
4/19/2012	2:57:10 PM	Bubbler valve closed
4/19/2012	2:57:10 PM	Bypass valve opened
4/19/2012	2:57:10 PM	Helium MFC set to  0.000000
4/19/2012	2:57:10 PM	H2 MFC set to  0.000000
4/19/2012	2:57:10 PM	BCl3 MFC set to  0.000000
4/19/2012	2:57:10 PM	PH3 MFC set to  0.000000
4/19/2012	2:57:10 PM	SiCl4 MFC set to  0.000000
4/19/2012	2:57:10 PM	Bypass solenoid MFC set to  0.000000
4/19/2012	2:57:10 PM	Tube furnace set to 0
4/19/2012	2:58:10 PM	Helium valve closed
4/19/2012	2:58:10 PM	H2 valve closed
4/19/2012	2:58:10 PM	BCl3 valve closed
4/19/2012	2:58:10 PM	PH3 valve closed
4/19/2012	2:58:10 PM	SiCl4 pre valve closed
4/19/2012	2:58:10 PM	SiCl4 post valve closed
4/19/2012	2:58:10 PM	Bypass valve closed
4/19/2012	2:58:10 PM	Bubbler valve closed
4/19/2012	2:58:10 PM	Main Vac valve opened
4/19/2012	2:58:10 PM	Helium MFC set to  0.000000
4/19/2012	2:58:10 PM	H2 MFC set to  0.000000
4/19/2012	2:58:10 PM	BCl3 MFC set to  0.000000
4/19/2012	2:58:10 PM	PH3 MFC set to  0.000000
4/19/2012	2:58:10 PM	SiCl4 MFC set to  0.000000
4/19/2012	2:58:10 PM	Bypass solenoid MFC set to  0.000000
4/19/2012	2:58:10 PM	Tube furnace set to 0
4/19/2012	3:58:10 PM	Run finished at 3:58 PM
4/19/2012	4:10:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/19/2012	4:10:46 PM	Recipe started at 4:10 PM
4/19/2012	4:10:46 PM	Helium valve closed
4/19/2012	4:10:46 PM	H2 valve closed
4/19/2012	4:10:46 PM	BCl3 valve closed
4/19/2012	4:10:46 PM	PH3 valve closed
4/19/2012	4:10:46 PM	SiCl4 pre valve closed
4/19/2012	4:10:46 PM	SiCl4 post valve closed
4/19/2012	4:10:46 PM	Main Vac valve closed
4/19/2012	4:10:46 PM	Bypass valve closed
4/19/2012	4:10:46 PM	Bubbler valve closed
4/19/2012	4:10:46 PM	Helium MFC set to  0.000000
4/19/2012	4:10:46 PM	H2 MFC set to  0.000000
4/19/2012	4:10:46 PM	BCl3 MFC set to  0.000000
4/19/2012	4:10:46 PM	PH3 MFC set to  0.000000
4/19/2012	4:10:46 PM	SiCl4 MFC set to  0.000000
4/19/2012	4:10:46 PM	Bypass solenoid MFC set to  0.000000
4/19/2012	4:10:47 PM	Tube furnace set to 0
4/19/2012	4:10:50 PM	H2 valve closed
4/19/2012	4:10:50 PM	BCl3 valve closed
4/19/2012	4:10:50 PM	PH3 valve closed
4/19/2012	4:10:50 PM	SiCl4 pre valve closed
4/19/2012	4:10:50 PM	SiCl4 post valve closed
4/19/2012	4:10:50 PM	Main Vac valve closed
4/19/2012	4:10:50 PM	Bypass valve closed
4/19/2012	4:10:50 PM	Bubbler valve closed
4/19/2012	4:10:50 PM	Helium valve opened
4/19/2012	4:10:50 PM	Helium MFC set to  500.000000
4/19/2012	4:10:50 PM	H2 MFC set to  0.000000
4/19/2012	4:10:50 PM	BCl3 MFC set to  0.000000
4/19/2012	4:10:50 PM	PH3 MFC set to  0.000000
4/19/2012	4:10:50 PM	SiCl4 MFC set to  0.000000
4/19/2012	4:10:50 PM	Bypass solenoid MFC set to  0.000000
4/19/2012	4:10:50 PM	Tube furnace set to 0
4/19/2012	4:11:50 PM	Helium valve closed
4/19/2012	4:11:50 PM	H2 valve closed
4/19/2012	4:11:50 PM	BCl3 valve closed
4/19/2012	4:11:50 PM	PH3 valve closed
4/19/2012	4:11:50 PM	SiCl4 pre valve closed
4/19/2012	4:11:50 PM	SiCl4 post valve closed
4/19/2012	4:11:50 PM	Main Vac valve closed
4/19/2012	4:11:50 PM	Bypass valve closed
4/19/2012	4:11:50 PM	Bubbler valve closed
4/19/2012	4:11:50 PM	Helium MFC set to  0.000000
4/19/2012	4:11:50 PM	H2 MFC set to  0.000000
4/19/2012	4:11:50 PM	BCl3 MFC set to  0.000000
4/19/2012	4:11:50 PM	PH3 MFC set to  0.000000
4/19/2012	4:11:50 PM	SiCl4 MFC set to  0.000000
4/19/2012	4:11:50 PM	Bypass solenoid MFC set to  0.000000
4/19/2012	4:11:51 PM	Tube furnace set to 0
4/19/2012	4:11:52 PM	Run finished at 4:11 PM
4/19/2012	4:11:52 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/19/2012	4:22:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/19/2012	4:22:15 PM	Recipe started at 4:22 PM
4/19/2012	4:22:15 PM	Helium valve closed
4/19/2012	4:22:15 PM	H2 valve closed
4/19/2012	4:22:15 PM	BCl3 valve closed
4/19/2012	4:22:15 PM	PH3 valve closed
4/19/2012	4:22:15 PM	SiCl4 pre valve closed
4/19/2012	4:22:15 PM	SiCl4 post valve closed
4/19/2012	4:22:15 PM	Main Vac valve closed
4/19/2012	4:22:15 PM	Bubbler valve closed
4/19/2012	4:22:15 PM	Bypass valve opened
4/19/2012	4:22:15 PM	Helium MFC set to  0.000000
4/19/2012	4:22:15 PM	H2 MFC set to  0.000000
4/19/2012	4:22:16 PM	BCl3 MFC set to  0.000000
4/19/2012	4:22:16 PM	PH3 MFC set to  0.000000
4/19/2012	4:22:16 PM	SiCl4 MFC set to  0.000000
4/19/2012	4:22:16 PM	Bypass solenoid MFC set to  0.000000
4/19/2012	4:22:16 PM	Tube furnace set to 0
4/19/2012	4:23:26 PM	Helium valve closed
4/19/2012	4:23:26 PM	H2 valve closed
4/19/2012	4:23:26 PM	BCl3 valve closed
4/19/2012	4:23:26 PM	PH3 valve closed
4/19/2012	4:23:26 PM	SiCl4 pre valve closed
4/19/2012	4:23:26 PM	SiCl4 post valve closed
4/19/2012	4:23:26 PM	Main Vac valve closed
4/19/2012	4:23:26 PM	Bubbler valve closed
4/19/2012	4:23:26 PM	Bypass valve opened
4/19/2012	4:23:26 PM	Helium MFC set to  0.000000
4/19/2012	4:23:26 PM	H2 MFC set to  0.000000
4/19/2012	4:23:26 PM	BCl3 MFC set to  0.000000
4/19/2012	4:23:26 PM	PH3 MFC set to  0.000000
4/19/2012	4:23:26 PM	SiCl4 MFC set to  0.000000
4/19/2012	4:23:26 PM	Bypass solenoid MFC set to  0.000000
4/19/2012	4:23:26 PM	Tube furnace set to 0
4/19/2012	4:24:26 PM	Helium valve closed
4/19/2012	4:24:26 PM	H2 valve closed
4/19/2012	4:24:26 PM	BCl3 valve closed
4/19/2012	4:24:26 PM	PH3 valve closed
4/19/2012	4:24:26 PM	SiCl4 pre valve closed
4/19/2012	4:24:26 PM	SiCl4 post valve closed
4/19/2012	4:24:26 PM	Bypass valve closed
4/19/2012	4:24:26 PM	Bubbler valve closed
4/19/2012	4:24:26 PM	Main Vac valve opened
4/19/2012	4:24:26 PM	Helium MFC set to  0.000000
4/19/2012	4:24:26 PM	H2 MFC set to  0.000000
4/19/2012	4:24:26 PM	BCl3 MFC set to  0.000000
4/19/2012	4:24:26 PM	PH3 MFC set to  0.000000
4/19/2012	4:24:26 PM	SiCl4 MFC set to  0.000000
4/19/2012	4:24:26 PM	Bypass solenoid MFC set to  0.000000
4/19/2012	4:24:26 PM	Tube furnace set to 0
4/19/2012	4:24:27 PM	Run finished at 4:24 PM
4/19/2012	4:24:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/19/2012	5:20:54 PM	Recipe started at 5:20 PM
4/19/2012	5:20:54 PM	Helium valve closed
4/19/2012	5:20:54 PM	H2 valve closed
4/19/2012	5:20:54 PM	BCl3 valve closed
4/19/2012	5:20:54 PM	PH3 valve closed
4/19/2012	5:20:54 PM	SiCl4 pre valve closed
4/19/2012	5:20:54 PM	SiCl4 post valve closed
4/19/2012	5:20:54 PM	Bypass valve closed
4/19/2012	5:20:54 PM	Bubbler valve closed
4/19/2012	5:20:54 PM	Main Vac valve opened
4/19/2012	5:20:54 PM	Helium MFC set to  0.000000
4/19/2012	5:20:54 PM	H2 MFC set to  0.000000
4/19/2012	5:20:54 PM	BCl3 MFC set to  0.000000
4/19/2012	5:20:54 PM	PH3 MFC set to  0.000000
4/19/2012	5:20:54 PM	SiCl4 MFC set to  0.000000
4/19/2012	5:20:54 PM	Bypass solenoid MFC set to  0.000000
4/19/2012	5:20:54 PM	Tube furnace set to 0
4/19/2012	6:05:54 PM	Helium valve closed
4/19/2012	6:05:54 PM	H2 valve closed
4/19/2012	6:05:54 PM	BCl3 valve closed
4/19/2012	6:05:54 PM	PH3 valve closed
4/19/2012	6:05:54 PM	SiCl4 pre valve closed
4/19/2012	6:05:54 PM	SiCl4 post valve closed
4/19/2012	6:05:54 PM	Main Vac valve closed
4/19/2012	6:05:54 PM	Bypass valve closed
4/19/2012	6:05:54 PM	Bubbler valve closed
4/19/2012	6:05:54 PM	Helium MFC set to  0.000000
4/19/2012	6:05:54 PM	H2 MFC set to  0.000000
4/19/2012	6:05:54 PM	BCl3 MFC set to  0.000000
4/19/2012	6:05:54 PM	PH3 MFC set to  0.000000
4/19/2012	6:05:54 PM	SiCl4 MFC set to  0.000000
4/19/2012	6:05:54 PM	Bypass solenoid MFC set to  0.000000
4/19/2012	6:05:54 PM	Tube furnace set to 0
4/19/2012	6:05:57 PM	Helium valve closed
4/19/2012	6:05:57 PM	BCl3 valve closed
4/19/2012	6:05:57 PM	PH3 valve closed
4/19/2012	6:05:57 PM	SiCl4 pre valve closed
4/19/2012	6:05:57 PM	SiCl4 post valve closed
4/19/2012	6:05:57 PM	Main Vac valve closed
4/19/2012	6:05:57 PM	Bypass valve closed
4/19/2012	6:05:57 PM	Bubbler valve closed
4/19/2012	6:05:57 PM	H2 valve opened
4/19/2012	6:05:57 PM	Helium MFC set to  0.000000
4/19/2012	6:05:57 PM	H2 MFC set to  500.000000
4/19/2012	6:05:57 PM	BCl3 MFC set to  0.000000
4/19/2012	6:05:57 PM	PH3 MFC set to  0.000000
4/19/2012	6:05:57 PM	SiCl4 MFC set to  0.000000
4/19/2012	6:05:57 PM	Bypass solenoid MFC set to  0.000000
4/19/2012	6:05:57 PM	Tube furnace set to 0
4/19/2012	6:07:04 PM	Helium valve closed
4/19/2012	6:07:04 PM	BCl3 valve closed
4/19/2012	6:07:04 PM	PH3 valve closed
4/19/2012	6:07:04 PM	SiCl4 pre valve closed
4/19/2012	6:07:04 PM	SiCl4 post valve closed
4/19/2012	6:07:04 PM	Main Vac valve closed
4/19/2012	6:07:04 PM	Bypass valve closed
4/19/2012	6:07:04 PM	H2 valve opened
4/19/2012	6:07:04 PM	Bubbler valve opened
4/19/2012	6:07:04 PM	Helium MFC set to  0.000000
4/19/2012	6:07:04 PM	H2 MFC set to  500.000000
4/19/2012	6:07:04 PM	BCl3 MFC set to  0.000000
4/19/2012	6:07:04 PM	PH3 MFC set to  0.000000
4/19/2012	6:07:04 PM	SiCl4 MFC set to  0.000000
4/19/2012	6:07:04 PM	Bypass solenoid MFC set to  0.000000
4/19/2012	6:07:04 PM	Tube furnace set to 0
4/19/2012	6:07:05 PM	Helium valve closed
4/19/2012	6:07:05 PM	BCl3 valve closed
4/19/2012	6:07:05 PM	PH3 valve closed
4/19/2012	6:07:05 PM	SiCl4 pre valve closed
4/19/2012	6:07:05 PM	SiCl4 post valve closed
4/19/2012	6:07:05 PM	Main Vac valve closed
4/19/2012	6:07:05 PM	Bypass valve closed
4/19/2012	6:07:05 PM	H2 valve opened
4/19/2012	6:07:05 PM	Bubbler valve opened
4/19/2012	6:07:05 PM	Helium MFC set to  0.000000
4/19/2012	6:07:05 PM	H2 MFC set to  500.000000
4/19/2012	6:07:05 PM	BCl3 MFC set to  0.000000
4/19/2012	6:07:05 PM	PH3 MFC set to  0.000000
4/19/2012	6:07:05 PM	SiCl4 MFC set to  0.000000
4/19/2012	6:07:05 PM	Bypass solenoid MFC set to  0.000000
4/19/2012	6:07:06 PM	Tube furnace set to 1000
4/19/2012	6:32:06 PM	Helium valve closed
4/19/2012	6:32:06 PM	PH3 valve closed
4/19/2012	6:32:06 PM	Main Vac valve closed
4/19/2012	6:32:06 PM	Bypass valve closed
4/19/2012	6:32:06 PM	H2 valve opened
4/19/2012	6:32:06 PM	BCl3 valve opened
4/19/2012	6:32:06 PM	SiCl4 pre valve opened
4/19/2012	6:32:06 PM	SiCl4 post valve opened
4/19/2012	6:32:06 PM	Bubbler valve opened
4/19/2012	6:32:06 PM	Helium MFC set to  0.000000
4/19/2012	6:32:06 PM	H2 MFC set to  450.000000
4/19/2012	6:32:06 PM	BCl3 MFC set to  1.000000
4/19/2012	6:32:06 PM	PH3 MFC set to  0.000000
4/19/2012	6:32:06 PM	SiCl4 MFC set to  50.000000
4/19/2012	6:32:06 PM	Bypass solenoid MFC set to  0.000000
4/19/2012	6:32:06 PM	Tube furnace set to 1000
4/19/2012	6:51:06 PM	Helium valve closed
4/19/2012	6:51:06 PM	BCl3 valve closed
4/19/2012	6:51:06 PM	PH3 valve closed
4/19/2012	6:51:06 PM	SiCl4 pre valve closed
4/19/2012	6:51:06 PM	SiCl4 post valve closed
4/19/2012	6:51:06 PM	Main Vac valve closed
4/19/2012	6:51:06 PM	Bypass valve closed
4/19/2012	6:51:06 PM	H2 valve opened
4/19/2012	6:51:06 PM	Bubbler valve opened
4/19/2012	6:51:06 PM	Helium MFC set to  0.000000
4/19/2012	6:51:06 PM	H2 MFC set to  500.000000
4/19/2012	6:51:06 PM	BCl3 MFC set to  0.000000
4/19/2012	6:51:06 PM	PH3 MFC set to  0.000000
4/19/2012	6:51:06 PM	SiCl4 MFC set to  0.000000
4/19/2012	6:51:06 PM	Bypass solenoid MFC set to  0.000000
4/19/2012	6:51:06 PM	Tube furnace set to 1000
4/19/2012	6:53:06 PM	Helium valve closed
4/19/2012	6:53:06 PM	BCl3 valve closed
4/19/2012	6:53:06 PM	Main Vac valve closed
4/19/2012	6:53:06 PM	Bypass valve closed
4/19/2012	6:53:06 PM	H2 valve opened
4/19/2012	6:53:06 PM	PH3 valve opened
4/19/2012	6:53:06 PM	SiCl4 pre valve opened
4/19/2012	6:53:06 PM	SiCl4 post valve opened
4/19/2012	6:53:06 PM	Bubbler valve opened
4/19/2012	6:53:06 PM	Helium MFC set to  0.000000
4/19/2012	6:53:06 PM	H2 MFC set to  430.000000
4/19/2012	6:53:06 PM	BCl3 MFC set to  0.000000
4/19/2012	6:53:06 PM	PH3 MFC set to  20.000000
4/19/2012	6:53:06 PM	SiCl4 MFC set to  50.000000
4/19/2012	6:53:06 PM	Bypass solenoid MFC set to  0.000000
4/19/2012	6:53:06 PM	Tube furnace set to 1000
4/19/2012	6:55:06 PM	Helium valve closed
4/19/2012	6:55:06 PM	BCl3 valve closed
4/19/2012	6:55:06 PM	PH3 valve closed
4/19/2012	6:55:06 PM	SiCl4 pre valve closed
4/19/2012	6:55:06 PM	SiCl4 post valve closed
4/19/2012	6:55:06 PM	Main Vac valve closed
4/19/2012	6:55:06 PM	Bypass valve closed
4/19/2012	6:55:06 PM	H2 valve opened
4/19/2012	6:55:06 PM	Bubbler valve opened
4/19/2012	6:55:06 PM	Helium MFC set to  0.000000
4/19/2012	6:55:06 PM	H2 MFC set to  500.000000
4/19/2012	6:55:06 PM	BCl3 MFC set to  0.000000
4/19/2012	6:55:06 PM	PH3 MFC set to  0.000000
4/19/2012	6:55:06 PM	SiCl4 MFC set to  0.000000
4/19/2012	6:55:06 PM	Bypass solenoid MFC set to  0.000000
4/19/2012	6:55:06 PM	Tube furnace set to 750
4/19/2012	7:10:06 PM	H2 valve closed
4/19/2012	7:10:06 PM	BCl3 valve closed
4/19/2012	7:10:06 PM	PH3 valve closed
4/19/2012	7:10:06 PM	SiCl4 pre valve closed
4/19/2012	7:10:06 PM	SiCl4 post valve closed
4/19/2012	7:10:06 PM	Main Vac valve closed
4/19/2012	7:10:06 PM	Bypass valve closed
4/19/2012	7:10:06 PM	Helium valve opened
4/19/2012	7:10:06 PM	Bubbler valve opened
4/19/2012	7:10:06 PM	Helium MFC set to  500.000000
4/19/2012	7:10:06 PM	H2 MFC set to  0.000000
4/19/2012	7:10:06 PM	BCl3 MFC set to  0.000000
4/19/2012	7:10:06 PM	PH3 MFC set to  0.000000
4/19/2012	7:10:06 PM	SiCl4 MFC set to  0.000000
4/19/2012	7:10:06 PM	Bypass solenoid MFC set to  0.000000
4/19/2012	7:10:07 PM	Tube furnace set to 0
4/19/2012	7:30:07 PM	Helium valve closed
4/19/2012	7:30:07 PM	H2 valve closed
4/19/2012	7:30:07 PM	BCl3 valve closed
4/19/2012	7:30:07 PM	PH3 valve closed
4/19/2012	7:30:07 PM	SiCl4 pre valve closed
4/19/2012	7:30:07 PM	SiCl4 post valve closed
4/19/2012	7:30:07 PM	Main Vac valve closed
4/19/2012	7:30:07 PM	Bypass valve closed
4/19/2012	7:30:07 PM	Bubbler valve closed
4/19/2012	7:30:07 PM	Helium MFC set to  0.000000
4/19/2012	7:30:07 PM	H2 MFC set to  0.000000
4/19/2012	7:30:07 PM	BCl3 MFC set to  0.000000
4/19/2012	7:30:07 PM	PH3 MFC set to  0.000000
4/19/2012	7:30:07 PM	SiCl4 MFC set to  0.000000
4/19/2012	7:30:07 PM	Bypass solenoid MFC set to  0.000000
4/19/2012	7:30:07 PM	Tube furnace set to 0
4/19/2012	7:50:07 PM	Helium valve closed
4/19/2012	7:50:07 PM	H2 valve closed
4/19/2012	7:50:07 PM	BCl3 valve closed
4/19/2012	7:50:07 PM	PH3 valve closed
4/19/2012	7:50:07 PM	SiCl4 pre valve closed
4/19/2012	7:50:07 PM	SiCl4 post valve closed
4/19/2012	7:50:07 PM	Main Vac valve closed
4/19/2012	7:50:07 PM	Bubbler valve closed
4/19/2012	7:50:07 PM	Bypass valve opened
4/19/2012	7:50:07 PM	Helium MFC set to  0.000000
4/19/2012	7:50:07 PM	H2 MFC set to  0.000000
4/19/2012	7:50:07 PM	BCl3 MFC set to  0.000000
4/19/2012	7:50:07 PM	PH3 MFC set to  0.000000
4/19/2012	7:50:07 PM	SiCl4 MFC set to  0.000000
4/19/2012	7:50:07 PM	Bypass solenoid MFC set to  0.000000
4/19/2012	7:50:07 PM	Tube furnace set to 0
4/19/2012	7:50:53 PM	Helium valve closed
4/19/2012	7:50:53 PM	H2 valve closed
4/19/2012	7:50:53 PM	BCl3 valve closed
4/19/2012	7:50:53 PM	PH3 valve closed
4/19/2012	7:50:53 PM	SiCl4 pre valve closed
4/19/2012	7:50:53 PM	SiCl4 post valve closed
4/19/2012	7:50:53 PM	Main Vac valve closed
4/19/2012	7:50:53 PM	Bubbler valve closed
4/19/2012	7:50:53 PM	Bypass valve opened
4/19/2012	7:50:53 PM	Helium MFC set to  0.000000
4/19/2012	7:50:53 PM	H2 MFC set to  0.000000
4/19/2012	7:50:53 PM	BCl3 MFC set to  0.000000
4/19/2012	7:50:53 PM	PH3 MFC set to  0.000000
4/19/2012	7:50:53 PM	SiCl4 MFC set to  0.000000
4/19/2012	7:50:53 PM	Bypass solenoid MFC set to  0.000000
4/19/2012	7:50:53 PM	Tube furnace set to 0
4/19/2012	7:51:53 PM	Helium valve closed
4/19/2012	7:51:53 PM	H2 valve closed
4/19/2012	7:51:53 PM	BCl3 valve closed
4/19/2012	7:51:53 PM	PH3 valve closed
4/19/2012	7:51:53 PM	SiCl4 pre valve closed
4/19/2012	7:51:53 PM	SiCl4 post valve closed
4/19/2012	7:51:53 PM	Bypass valve closed
4/19/2012	7:51:53 PM	Bubbler valve closed
4/19/2012	7:51:53 PM	Main Vac valve opened
4/19/2012	7:51:53 PM	Helium MFC set to  0.000000
4/19/2012	7:51:53 PM	H2 MFC set to  0.000000
4/19/2012	7:51:53 PM	BCl3 MFC set to  0.000000
4/19/2012	7:51:53 PM	PH3 MFC set to  0.000000
4/19/2012	7:51:53 PM	SiCl4 MFC set to  0.000000
4/19/2012	7:51:53 PM	Bypass solenoid MFC set to  0.000000
4/19/2012	7:51:53 PM	Tube furnace set to 0
4/19/2012	8:51:53 PM	Run finished at 8:51 PM
